In situ monitoring of the MBE growth of AlSb by spectroscopic ellipsometry

Title
In situ monitoring of the MBE growth of AlSb by spectroscopic ellipsometry
Authors
김준영윤재진이은혜배민환송진동김영동
Issue Date
2013-02
Publisher
한국진공학회
URI
http://pubs.kist.re.kr/handle/201004/44718
Appears in Collections:
KIST Publication > Conference Paper
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