Design of EUV Mirror Using ZrN/Si Thin Films

Title
Design of EUV Mirror Using ZrN/Si Thin Films
Authors
김용수성하민김용진조운조이주한김용태전영민
Keywords
ZrN/Si Thin Films; EUV Mirror; Mo/Si Thin Films; Interdiffusion Layers
Issue Date
2013-04
Publisher
차세대 리소그래피 학술대회
Citation
VOL 2, 51-52
URI
http://pubs.kist.re.kr/handle/201004/44719
Appears in Collections:
KIST Publication > Conference Paper
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