Development of Coherent EUV Light Source for EUV Metrology

Title
Development of Coherent EUV Light Source for EUV Metrology
Authors
성하민김용수조운조박민철함용희김점술김재헌우덕하이석이주한김용태전영민
Keywords
High Harmonic Generation; Extreme Ultra Violet
Issue Date
2013-04
Publisher
차세대 리소그래피 학술대회
Citation
VOL 2, 113-114
URI
http://pubs.kist.re.kr/handle/201004/44720
Appears in Collections:
KIST Publication > Conference Paper
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