Cantilever Arrayed Blood Pressure Sensor for Arterial Applanation Tonometry

Title
Cantilever Arrayed Blood Pressure Sensor for Arterial Applanation Tonometry
Authors
이병렬정진우조찬섭김진석김봉환김현철전국진
Keywords
Blood pressure sensor; contact force sensor; PDMS
Issue Date
2013-04
Publisher
8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Citation
, 907-910
Abstract
We developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulkmicromachining for the noninvasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in resistance of the piezoresistor on a 5-μm-thick-arrayed perforated membrane and 20-μm-thick metal pads. The length and width of the unit membrane are 210 and 310 μm, respectively. The width of the insensible zone between adjacent units is only 10 μm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the PDMS package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and resolution of the fabricated blood pressure sensor were greater than 900 mmHg and less than 1 mmHg, respectively.
URI
http://pubs.kist.re.kr/handle/201004/44744
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE