Electrical and Optical Properties of Indium Zinc Oxide (IZO) Thin Films by Continuous Composition Spread

Title
Electrical and Optical Properties of Indium Zinc Oxide (IZO) Thin Films by Continuous Composition Spread
Authors
이진주김진상윤석진조용수최지원
Keywords
Indium Zinc Oxide; Continuous Composition Spread; Transparent Conductive Oxide
Issue Date
2013-05
Publisher
Journal of nanoscience and nanotechnology
Citation
VOL 13, NO 5, 3317-3320
Abstract
Indium zinc oxide (IZO) films were deposited on glass substrate at room temperature using off-axis RF sputtering-continuous composition spread (CCS) system. The full range composition of IZO films were controlled by the deposition rate and thickness profiles of In2O3 and ZnO target. The structural, electrical and optical properties of IZO thin films were measured as functions of position. IZO thin film had the lowest resistivity and highest carrier concentration at the position of 15 mm (5.02×10−4 Ω cm, 3.9×1020/㎤). And IZO thin film had high transmittance in visible region at measured all positions. This study has investigated to explore the new composition of IZO films using CCS system.
URI
http://pubs.kist.re.kr/handle/201004/44753
ISSN
15334880
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KIST Publication > Article
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