Characterization of amorphous Mn doped tin oxide semiconductor thin-film prepared by rf sputtering

Title
Characterization of amorphous Mn doped tin oxide semiconductor thin-film prepared by rf sputtering
Authors
이칠형최두진오영제
Keywords
Tin dioxide; Manganese doping; Optical & electrical property; Amorphous transparent oxide semiconductor
Issue Date
2013-04
Publisher
2013년도 한국세라믹학회 춘계학술대회
URI
http://pubs.kist.re.kr/handle/201004/44814
Appears in Collections:
KIST Publication > Conference Paper
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