L10 ordering of FePtB layers by oxidation-induced stress of capping layer
- L10 ordering of FePtB layers by oxidation-induced stress of capping layer
- 최경민; 민병철; 신경호
- Issue Date
- Applied physics. A, Materials science & processing
- VOL 111, NO 2, 389-394
- We have studied the L10 ordering of FePtB layers
assisted by the oxidation-induced stress of a capping layer.
In the thermally oxidized Si substrate/MgO/CoFeB/FePtB/
Ti structure, the oxidation of the Ti capping layer during
post-deposition annealing exerts an in-plane tensile stress on
the FePtB layer, which promotes L10 ordering of the FePtB
layer. The diffusion of boron from the FePtB layer into the
Ti layer also plays a crucial role in the L10 ordering. The
CoFeB/FePtB composite layers can be used for the top electrode
of perpendicular magnetic tunnel junctions.
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