L10 ordering of FePtB layers by oxidation-induced stress of capping layer

Title
L10 ordering of FePtB layers by oxidation-induced stress of capping layer
Authors
최경민민병철신경호
Issue Date
2013-05
Publisher
Applied physics. A, Materials science & processing
Citation
VOL 111, NO 2, 389-394
Abstract
We have studied the L10 ordering of FePtB layers assisted by the oxidation-induced stress of a capping layer. In the thermally oxidized Si substrate/MgO/CoFeB/FePtB/ Ti structure, the oxidation of the Ti capping layer during post-deposition annealing exerts an in-plane tensile stress on the FePtB layer, which promotes L10 ordering of the FePtB layer. The diffusion of boron from the FePtB layer into the Ti layer also plays a crucial role in the L10 ordering. The CoFeB/FePtB composite layers can be used for the top electrode of perpendicular magnetic tunnel junctions.
URI
http://pubs.kist.re.kr/handle/201004/44909
ISSN
09478396
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KIST Publication > Article
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