Syntheses and Properties of Quaternary Cr-Ti-B-N Coatings by a High Power Impulse Magnetron Sputtering Technique
- Syntheses and Properties of Quaternary Cr-Ti-B-N Coatings by a High Power Impulse Magnetron Sputtering Technique
- Hee-Bok Myoung; Teng Fei Zhang; 박종극; Doo-In Kim; Kwang Ho Kim
- HIPIMS; CR-Ti-B-N coatings; Nanocomposites; Friction; Anti-corrosion
- Issue Date
- 한국표면공학회지; Journal of The Korean Institute of Surface Engineering
- VOL 45, NO 6, 232-240
- Cr-Ti-B-N coatings were synthesized by a hybrid coating system combining high power impulse magnetron sputtering (HIPIMS) and DC pulse magnetron sputtering from a TiB2 and a Cr target in argon-nitrogen environment, respectively. By changing the power applied on the Cr and TiB2 cathodes, the Cr-Ti-B-N coatings with various Ti/Cr ratio and B content were deposited. The phase structure, microstructure and chemical compositions of the Cr-Ti-B-N coatings were studied by X-ray diffraction (XRD), transmission scanning electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS). With increase of Cr element in the coatings, the nanocomposite microstructure consisting of nano-sized (Cr, Ti) N crystallites and amorphous BN phase were obtained in the coatings. The microhardness of the Cr-Ti-B-N coatings exhibited a peak value of ~41 GPa for the CrTi0.1B0.4N1.3, and then decreased with further increase of Cr content in the coatings, and all the coatings exhibited low friction coefficient. The oxidation and corrosion behavior of the Cr-Ti-B-N coatings revealed better properties due to the formation of a nanocomposite microstructure.
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