Electric and longitudinal piezoelectric properties of PZT(52/48) films as a function of thickness prepared by diol based sol-gel method

Title
Electric and longitudinal piezoelectric properties of PZT(52/48) films as a function of thickness prepared by diol based sol-gel method
Authors
Jeong-Hoon Lee윤기현김태송
Keywords
thickness; orientation; piezoelectric; MEMS; sol-gel; diol
Issue Date
2001-11
Publisher
Integrated ferroelectrics
Citation
VOL 41, 119-128
URI
http://pubs.kist.re.kr/handle/201004/45307
ISSN
1058-4587
Appears in Collections:
KIST Publication > Article
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