Thin film growth and surface modification by keV ion beam

Title
Thin film growth and surface modification by keV ion beam
Authors
최성창박용욱최원국김기환조준식한성조정정선한영건유병국정형진고석근
Keywords
ion beam modification; ion beam sputter deposition; ZnO thin film; polymethylmethacrylate; wettablilty
Issue Date
1998-12
Publisher
Japanese Journal of Applied Physics, Part 1- Regular Papers
Citation
VOL 37, NO 12B, 6984-6990
URI
http://pubs.kist.re.kr/handle/201004/45321
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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