Effect of plasma immersion on crystallinity of V2O5 film grown by dc reactive sputtering at room temperature

Title
Effect of plasma immersion on crystallinity of V2O5 film grown by dc reactive sputtering at room temperature
Authors
최선희김주선윤영수
Keywords
sputtering; plasma processing and deposition; vanadium oxide; crystallization
Issue Date
2005-12
Publisher
Thin solid films
Citation
VOL 493, NO 1-2, 1-5
URI
http://pubs.kist.re.kr/handle/201004/45338
ISSN
0040-6090
Appears in Collections:
KIST Publication > Article
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