Effect of oxygen partial pressure on the surface morphology of sputtered YBCO thin films

Title
Effect of oxygen partial pressure on the surface morphology of sputtered YBCO thin films
Authors
김영환김성일
Keywords
YBCO thin films; RF magnetron sputtering; smooth surface morphology
Issue Date
2004-12
Publisher
Journal of the Korean Physical Society
Citation
VOL 45, NO 6, 1584-1587
URI
http://pubs.kist.re.kr/handle/201004/45340
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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