Tungsten Nanodot Arrays Patterned Using Diblock Copolymer Templates

Title
Tungsten Nanodot Arrays Patterned Using Diblock Copolymer Templates
Authors
강길범김성일김영환박민철김용태이창우
Keywords
diblock copolymer; copolymer lithography; reactive ion etching; nanodot; nanotemplate
Issue Date
2007-02
Publisher
Japanese Journal of Applied Physics, Part 1- Regular Papers
Citation
VOL 46, NO 2, 856-858
URI
http://pubs.kist.re.kr/handle/201004/45417
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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