Fabrication of Size Controlled Nanohole Array on III-V Semiconductor substrate by ICP-RIE using Nanoporous Alumina Mask

Title
Fabrication of Size Controlled Nanohole Array on III-V Semiconductor substrate by ICP-RIE using Nanoporous Alumina Mask
Authors
정미이석변영태전영민김선호모선일우덕하
Keywords
nanohole; III-V Semiconductor; Nanoporous Alumina Mask; ICP-RIE
Issue Date
2007-06
Publisher
Solid state phenomena
Citation
VOL 124-126, 1301-1304
URI
http://pubs.kist.re.kr/handle/201004/45438
ISSN
10120394
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE