Shape Memory Effect in Fe-Pd Magnetic Shape Memory Alloy Thin Films
- Shape Memory Effect in Fe-Pd Magnetic Shape Memory Alloy Thin Films
- 한준현; 안현태; 김태현; 지광구
- Shape memory effect (SME); Magnetic shape memory effect (MSME); Fe-Pd; Curvature; Residual stress
- Issue Date
- Materials science forum
- VOL 654-656, 2107-2110
- The shape memory effect (SME) and magnetic shape memory effect (MSME) in Fe-Pd
thin film were studied using the film curvature method. The residual stress changes due to the SME
and MSME in Fe-Pd film were measured during thermal cycling and magnetic field changing,
respectively. A Fe-Pd thin film with a lateral composition gradient was deposited onto the
micromachined 7x7 cantilever beam array substrate, such that each of the cantilever beams was
coated with a film of different composition. There was an abrupt stress change in only the 28.1 at %
Pd thin film as the temperature of the film was cycled, and the corresponding stress change was
measured as 0.16 GPa. The film with 29.4 at % Pd showed the abrupt stress change under a magnetic
field of 0.7 Tesla, which means that the film of the composition had the MSME.
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