Transmission Electron Microscope Study of In Situ Polycrystalline Si Film Grown by Catalyzer-Enhanced Chemical vapor deposition

Title
Transmission Electron Microscope Study of In Situ Polycrystalline Si Film Grown by Catalyzer-Enhanced Chemical vapor deposition
Authors
김한기김명수박정우조운조
Keywords
silicon; cvd; polycrystalline
Issue Date
2007-03
Publisher
Journal of the Electrochemical Society
Citation
VOL 154, NO 3, J73-J76
URI
http://pubs.kist.re.kr/handle/201004/45644
ISSN
0013-4651
Appears in Collections:
KIST Publication > Article
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