Enhancement of Electrical Properties of Pt/SrBi2Nb2O9/Pt Structures by Remote Oxygen Plasma Annealing

Title
Enhancement of Electrical Properties of Pt/SrBi2Nb2O9/Pt Structures by Remote Oxygen Plasma Annealing
Authors
Ik Soo KimYoung Mi KimIn-Hoon Choi김성일김영환Dong Chul YooJeong Yong LeeChang-Sik Son
Keywords
Ferroelectrics; SBN thin lms; Oxygen plasma; rapid thermal annealing
Issue Date
2004-11
Publisher
Journal of the Korean Physical Society
Citation
VOL 45, NO 5, 1275-1278
URI
http://pubs.kist.re.kr/handle/201004/45748
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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