Fabrication of Smooth Patterned Structures of Refractory Metals, Semiconductors, and Oxides via Template Stripping

Title
Fabrication of Smooth Patterned Structures of Refractory Metals, Semiconductors, and Oxides via Template Stripping
Authors
박종혁Prashant NagpalKevin M. McPeakNathan C. LindquistSang-Hyun OhDavid J. Norris
Keywords
template stripping; refractory metals; oxides; photovoltaics; themophotovoltaics
Issue Date
2013-09
Publisher
ACS Applied Materials & Interfaces
Citation
VOL 5, NO 19, 9701-9708
Abstract
The template-stripping method can yield smooth patterned films without surface contamination. However, the process is typically limited to coinage metals such as silver and gold because other materials cannot be readily stripped from silicon templates due to strong adhesion. Herein, we report a more general template-stripping method that is applicable to a larger variety of materials, including refractory metals, semiconductors, and oxides. To address the adhesion issue, we introduce a thin gold layer between the template and the deposited materials. After peeling off the combined film from the template, the gold layer can be selectively removed via wet etching to reveal a smooth patterned structure of the desired material. Further, we demonstrate template-stripped multilayer structures that have potential applications for photovoltaics and solar absorbers. An entire patterned device, which can include a transparent conductor, semiconductor absorber, and back contact, can be fabricated. Since our approach can also produce many copies of the patterned structure with high fidelity by reusing the template, a low-cost and high-throughput process in micro- and nanofabrication is provided that is useful for electronics, plasmonics, and nanophotonics.
URI
http://pubs.kist.re.kr/handle/201004/45993
ISSN
19448244
Appears in Collections:
KIST Publication > Article
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