Orientation Control of Block Copolymer Thin Films Placed on Ordered Nanoparticle Monolayers

Title
Orientation Control of Block Copolymer Thin Films Placed on Ordered Nanoparticle Monolayers
Authors
김태희우상혁손정곤차국헌
Keywords
block copolymer; microdomain; nanopatterns; perpendicular orientation
Issue Date
2013-10
Publisher
Macromolecules
Citation
VOL 46, NO 20, 8144-8151
Abstract
We investigate orientation and lateral ordering of poly(styrene-block-methyl methacrylate) (PS-b-PMMA) diblock copolymer (diBCP) thin films placed on ordered nanoparticle (NP) monolayers. The densely packed NP monolayers were prepared on silicon substrates with the Langmuir−Blodgett (LB) deposition technique. The perpendicular domain orientation of BCP thin films is obtained on the ordered NP monolayers due to the nanoscale regular roughness which exerts the elastic deformation on the BCP nanodomains and suppresses the substrate-induced parallel orientation. The effect of BCP film thickness as well as the NP size on the orientation of BCP nanodomains was systematically investigated. We also demonstrate the defect-tolerant ordering of the perpendicular orientation of BCP thin films on the NP-vacant sites.
URI
http://pubs.kist.re.kr/handle/201004/46066
ISSN
00249297
Appears in Collections:
KIST Publication > Article
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