Sieve Type MEMS Neural Electrode for Signal Recording of Spinal Cord
- Sieve Type MEMS Neural Electrode for Signal Recording of Spinal Cord
- 정진우; 김세환; 정규환; 김태형; 김진석; 전국진
- Issue Date
- 2013년도 대한전자공학회 하계종합학술대회
- Sieve type MEMS neural electrode for signal recording of rat spinal cord is suggested and
fabricated successfully. The suggested device has 6 ring-shape platinum electrodes with a inner diameter of 200μm to acquire spinal cord signals. The fabricated device based on Polyimide thick film is characterized by measuring the electrochemical impedance. The obtained value is
17.9kΩ at 1kHz, that is sufficient for neural electrodes.
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- KIST Publication > Conference Paper
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