3D electrode fabrication for measurement of neurospheroid signal and impedance

3D electrode fabrication for measurement of neurospheroid signal and impedance
Issue Date
Asian Pacific Conference on Biomechanics
Cell therapy has been studied a lot to apply to cranial nerve degenerative diseases. But overcoming limitation of low survival rate of transplanted cells is the important thing for cell therapy. For this, studies of transplanting cells in spheroid type are under way. However, the characteristic of cell spheroid is not grasped yet. General MEA can get signals only on a single contact spot with neurospheroid, it is hard to grasp the character of cells spheroid. For this, 3D slope type and cantilever type electrode were developed to make multiple contacts possible with cell spheroid. Slope type electrode has 180um-depth, 200um-length of one side. Au electrodes are placed four side of slop, so we can use four channels to get the neurospheroid signal. Cantilever type electrode has hemisphere empty space with 100um-depth and 200um-diameter. 10um thickness of Ni electrode was located on the empty space. We were using MEMS process to fabrication of designed electrodes. Images of fabricated device are as follows (Figure. 1.). In electrochemical impedance of fabricated electrodes, slope type electrode was 80.5 kohm, cantilever type1 electrode was 16 kohm and cantilever type2 electrode was 23kohm per 1 kHz on the average. In contact impedance, slope type was 422.96 kohm, cantilever type1 was 46 kohm and cantilever type2 was 39.4 kohm (Figure. 2.).
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