The study of Ge2Sb2Te5 films surface after chemical mechanical planarization in various slurries condition

Title
The study of Ge2Sb2Te5 films surface after chemical mechanical planarization in various slurries condition
Authors
김현수원재형김용태성만영
Issue Date
2013-04
Publisher
2013 MRS Spring Meeting
URI
http://pubs.kist.re.kr/handle/201004/46643
Appears in Collections:
KIST Publication > Conference Paper
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