Cell Pitch Design Limitation for Electrical and Thermal Characteristics in Super Junction MOSFET

Title
Cell Pitch Design Limitation for Electrical and Thermal Characteristics in Super Junction MOSFET
Authors
금종민경신수정은식김용태성만영
Keywords
semiconductor power device; super junction MOSFET; TCAD simulation
Issue Date
2013-09
Publisher
International Conference on Solid State Devices and Materials 2013
Citation
, 482-483
Abstract
In Super Junction (SJ) MOSFET, Cell pitch parameter has to be considered because of the on-resistance characteristics. Unlike conventional Power MOSFET, SJ MOSFET has opposite tendency of the on-resistance characteristics when cell pitch is reduced. In this paper, electrical and thermal characteristic effects of the cell pitch degradation in SJ MOSFET are simulated to confirm opposite tendency using TCAD tool.
URI
http://pubs.kist.re.kr/handle/201004/46649
Appears in Collections:
KIST Publication > Conference Paper
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