Carbon nanoflake growth from carbon nanotubes by hot filament chemical vapor deposition
- Carbon nanoflake growth from carbon nanotubes by hot filament chemical vapor deposition
- Subasa C. Sahoo; Dipti R. Mohapatra; 이학주; Suhas M. Jejurikar; 김인호; 이승철; 박종극; 백영준; 이욱성
- Issue Date
- VOL 67, 704-711
- We report the growth of carbon nanoflakes (CNFs) on Si substrate by the hot filament chemical vapor deposition without the substrate bias or the catalyst. CNFs were grown using the
single wall carbon nanotubes and the multiwall carbon nanotubes as the nucleation center,
in the Ar-rich CH4–H2–Ar precursor gas mixture with 1% CH4, at the chamber pressure and
the substrate temperature of 7.5 Torr and 840 ℃, respectively. In the H2-rich condition, CNF
synthesis failed due to severe etch-removal of carbon nanotubes (CNTs) while it was successful at the optimized Ar-rich condition. Other forms of carbon such as nano-diamond or
mesoporous carbon failed to serve as the nucleation centers for the CNF growth. We proposed a mechanism of the CNF synthesis from the CNTs, which involved the initial unzipping
of CNTs by atomic hydrogen and subsequent nucleation and growth of CNFs from the
unzipped portion of the graphene layers.
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