Low Temperature Synthesis of Hexagonal Boron Nitride (White Graphene) by Remote Plasma Enhanced Chemical Vapor Deposition

Title
Low Temperature Synthesis of Hexagonal Boron Nitride (White Graphene) by Remote Plasma Enhanced Chemical Vapor Deposition
Authors
조현진박성찬이창협강정호박진형강상욱김명종
Keywords
hexagonal boron nitride; white graphene; plasma; chemical vapor deposition
Issue Date
2013-07
Publisher
Nano Korea 2013
Abstract
In order to synthesize high quality and large area hexagonal boron nitride nanosheets (h-BNNS, white graphene), pure borazine (B3N3H6) was used as a molecular precursor, and argon (Ar) was added in order to greatly facilitate the effect of plasma (ICP). Electrochemical polished metal foils were used as catalysts and the catalytic effect of various metals has been studied. The plasma (ICP) could supply high enough energy to dissociate gases forming ionized species of borazine in a quartz tube furnace of CVD setup. In this study, one or few layers of h-BNNS were synthesized at mild temperatures under plasma enhanced chemical vapor deposition (PECVD) at the optimal ratio between borazine and argon. The analyses of h-BNNS were carried out using SEM, Raman, FT-IR, XPS, TEM, EELS and SAED. As an application, the gas barrier effect of has been demonstrated.
URI
http://pubs.kist.re.kr/handle/201004/46786
Appears in Collections:
KIST Publication > Conference Paper
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