Design and Construction of an EUV Grating Spectrometer for the High Harmonic Generation at 13.5 nm

Title
Design and Construction of an EUV Grating Spectrometer for the High Harmonic Generation at 13.5 nm
Authors
김점술함용희정재룡권승호성하민김용수전영민
Keywords
고차조화파; 극자외선; 분광기
Issue Date
2013-04
Publisher
차세대 리소그래피 학술대회
Citation
VOL F2-III-3, 72-73
URI
http://pubs.kist.re.kr/handle/201004/46789
Appears in Collections:
KIST Publication > Conference Paper
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