A multi-channel oscillator for a resonant chemical sensor system
- A multi-channel oscillator for a resonant chemical sensor system
- 이현주; 박관규; Omer Oralkan; Mario Kupnik; Butrus T. Khuri-Yakub
- Chemical sensor; CMUT; multi-channel
oscillators; humidity detection; Capacitive micromachined ultrasonic transducer
- Issue Date
- IEEE transactions on industrial electronics
- VOL 61, NO 10, 5632-5640
- Vapor detection using highly sensitive miniaturized
resonant sensors is of great interest for many applications
including consumer, industrial, and environmental applications.
An operational-amplifier-based multi-channel oscillator that
interfaces with a 50-MHz capacitive micromachined ultrasonic
transducer (CMUT) array is presented for chemical sensing
applications. The circuit was implemented in a 0.18-μm CMOS
technology to reduce power consumption, number of wires, and
active area per channel. The presented integrated circuit (IC) also
addresses the potential frequency-locking problem between
channels by allowing the open-loop gain to be adjustable off-chip.
The feasibility of the developed oscillator for the chemical sensing
application is demonstrated. Two channels that were operated
simultaneously achieved excellent volume sensitivities of
8.5 x 10-4%/Hz and 3.9 x 10-4%/Hz, respectively to relative
humidity in N2.
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