Functionalization layers for CO2 sensing using capacitive micromachined ultrasonic transducers

Title
Functionalization layers for CO2 sensing using capacitive micromachined ultrasonic transducers
Authors
이현주박관규Mario KupnikButrus T. Khuri-Yakub
Issue Date
2012-11
Publisher
Sensors and actuators. B, Chemical
Citation
VOL 174, 87-93
URI
http://pubs.kist.re.kr/handle/201004/47230
ISSN
09254005
Appears in Collections:
KIST Publication > Article
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