Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen

Title
Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen
Authors
박관규이현주G. G. YaraliogluOmer OralkanMario KupnikC. F. QuateB.-T. Khuri-YakbuT. BraunH. P. LangM. HegnerC. GerberJ. Gimzewski
Issue Date
2007-08
Publisher
Applied physics letters
Citation
VOL 91, NO 9, 094102-1-094102-3
URI
http://pubs.kist.re.kr/handle/201004/47231
ISSN
00036951
Appears in Collections:
KIST Publication > Article
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