Surface properties of silicon patterned surfaces with the aspect ratio
- Surface properties of silicon patterned surfaces with the aspect ratio
- Nagaraj Machavallavan; Shuxue Piao; 조일주; 윤의성
- Pattern; Wetting; Adhesion; Friction; Aspect ratio
- Issue Date
- ISNIT 2013
- The present work investigates an influence of aspect ratio on the characteristics of
silicon patterned surfaces. Silicon surfaces were photo-lithographically patterned on circular pillar patterns with diameter of 3 μm, pitch of 6 μm, and different aspect ratio ranging from 0.06 to 8.33. The patterned silicon surfaces were modified with thin film layer of low surface energy
materials such as PTFE to observe its secondary effect. First, wetting behavior of all patterned samples is characterized using Water Contact Angle measurement (WCA). Secondly, Tribological behavior is characterized using Atomic Force Microscopy. We observed that WCA of silicon
patterned surfaces under low aspect ratio is decreased with roughness factor, which is good
agreement with the Wenzel prediction. Wetting characteristics is changed with the aspect ratio. In case of hydrophobic PTFE surfaces, their trend follows Wenzel prediction. Tribological studies show that there is not much difference in adhesion & frictional behavior although aspect ratio and roughness factor of surfaces are varied. It is explained based on concept of contact area. Our experimental observations show that thin film layer of PTFE coating enhances the hydrophobicity & tribological characteristics of silicon surfaces.
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