Full swing logic inverter with amorphous SiInZnO and GaInZnO thin film transistors

Title
Full swing logic inverter with amorphous SiInZnO and GaInZnO thin film transistors
Authors
풀락Sang Yeol Lee
Issue Date
2012-08
Publisher
Applied physics letters
Citation
VOL 101, NO 9, 092103-1-092103-3
Abstract
A high-performance n-channel metal-oxide-semiconductor inverter implemented consisting of enhancement mode driving thin-film transistor with amorphous Ga-In-Zn-O (a-GIZO) and depletion mode load with amorphous Si-In-Zn-O (a-SIZO) is demonstrated. The threshold voltage of the post-annealed a-SIZO load thin film transistor(TFT) exhibits negative value while the threshold voltage of the GIZO driving TFT exhibits positive value. The proposed inverter composed of a-SIZO and a-GIZO TFT shows much improved switching characteristics with higher voltage gain.
URI
http://pubs.kist.re.kr/handle/201004/47302
ISSN
00036951
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