Full swing logic inverter with amorphous SiInZnO and GaInZnO thin film transistors
- Full swing logic inverter with amorphous SiInZnO and GaInZnO thin film transistors
- 풀락; Sang Yeol Lee
- Issue Date
- Applied physics letters
- VOL 101, NO 9, 092103-1-092103-3
- A high-performance n-channel metal-oxide-semiconductor inverter implemented consisting of enhancement mode driving thin-film transistor with amorphous Ga-In-Zn-O (a-GIZO) and depletion mode load with amorphous Si-In-Zn-O (a-SIZO) is demonstrated. The threshold voltage of the post-annealed a-SIZO load thin film transistor(TFT) exhibits negative value while the threshold voltage of the GIZO driving TFT exhibits positive value. The proposed inverter composed of a-SIZO and a-GIZO TFT shows much improved switching characteristics with higher voltage gain.
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