Mass-Production Memories (DRAM and Flash)

Title
Mass-Production Memories (DRAM and Flash)
Authors
Cheol Seong Hwang김성근Sang Woon Lee
Keywords
atomic layer deposition; DRAM; Flash
Issue Date
2014-02
Publisher
Atomic Layer Deposition for Semiconductors
Citation
, 73-122
URI
http://pubs.kist.re.kr/handle/201004/47355
Appears in Collections:
KIST Publication > ETC
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