Development of a Coherent EUV Light Source for EUV Mask Inspection

Title
Development of a Coherent EUV Light Source for EUV Mask Inspection
Authors
김용수안준모성하민조운조박민철김점술김재헌우덕하이석이주한김용태전영민
Keywords
EUV; HHG
Issue Date
2014-02
Publisher
2014 한국반도체학회
URI
http://pubs.kist.re.kr/handle/201004/47393
Appears in Collections:
KIST Publication > Conference Paper
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