Cantilever arrayed blood pressure sensor for arterial applanation tonometry

Title
Cantilever arrayed blood pressure sensor for arterial applanation tonometry
Authors
이병렬정진우김진석김봉환전국진
Issue Date
2014-03
Publisher
IET NANOBIOTECHNOLOGY
Citation
VOL 8, NO 1, 37-43
Abstract
The authors developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulkmicromachining for the non-invasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in the resistance of the piezoresistor on a 5-μm-thick-arrayed perforated membrane and 20-μm-thick metal pads. The length and the width of the unit membrane are 210 and 310 μm, respectively. The width of the insensible zone between the adjacent units is only 10 μm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the polydimethylsiloxane package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and the resolution of the fabricated blood pressure sensor were greater than 900 mmHg ( = 120 kPa) and less than 1 mmHg ( = 133.3 Pa), respectively.
URI
http://pubs.kist.re.kr/handle/201004/47430
ISSN
17518741
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE