Enhanced sensitivity of piezoelectric pressure sensor with microstructured polydimethylsiloxane layer

Title
Enhanced sensitivity of piezoelectric pressure sensor with microstructured polydimethylsiloxane layer
Authors
최욱이준우유용경강성철김진석이정훈
Issue Date
2014-03
Publisher
Applied physics letters
Citation
VOL 104, NO 12, 123701-1-123701-4
Abstract
Highly sensitive detection tools that measure pressure and force are essential in palpation as well as real-time pressure monitoring in biomedical applications. So far, measurement has mainly been done by force sensing resistors and field effect transistor (FET) sensors for monitoring biological pressure and force sensing. We report a pressure sensor by the combination of a piezoelectric sensor layer integrated with a microstructured Polydimethylsiloxane (μ-PDMS) layer. We propose an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source that is used in FET sensors, by incorporating a microstructured PDMS layer in a piezoelectric sensor. By measuring the directly induced electrical charge from the microstructure-enhanced piezoelectric signal, we observed a 3-fold increased sensitivity in a signal response. Both fast signal relaxation from force removal and wide dynamic range from 0.23 to 10 kPa illustrate the good feasibility of the thin film piezoelectric sensor for mimicking human skin.
URI
http://pubs.kist.re.kr/handle/201004/47434
ISSN
00036951
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KIST Publication > Article
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