Chemiresistive Sensor Array Based on Semiconducting Metal Oxides for Environmental Monitoring

Title
Chemiresistive Sensor Array Based on Semiconducting Metal Oxides for Environmental Monitoring
Authors
문희규한수덕강민규정우석장호원유광수박형호강종윤
Keywords
Gas sensors; Oxide semiconductors; TiO2; SnO2; WO3; In2O3; Chemiresistive thin film sensor array
Issue Date
2014-02
Publisher
Journal of Sensor Science and Technology
Citation
VOL 23, NO 1, 15-18
Abstract
We present gas sensing performance based on 2X2 sensor array with four different elements (TiO2, SnO2, WO3 and In2O3 thin films) fabricated by rf sputter. Each thin film was deposited onto the selected SiO2/Si substrate with Pt interdigitated electrodes (IDEs) of 5 μm spacing which were fabricated on a SiO2/Si substrate using photolithography and dry etching. For 5 ppm NO2 and 50 ppm CO, each thin film sensor has a different response to offers the distinguishable response pattern for different gas molecules. Compared with the conventional micro-fabrication technology, 2X2 sensor array with such remarkable response pattern will be open a new foundation for monolithic integration of high-performance chemoresistive sensors with simplicity in fabrication, low cost, high reliablity, and multifunctional smart sensors for environmental monitoring.
URI
http://pubs.kist.re.kr/handle/201004/47957
ISSN
12255475
Appears in Collections:
KIST Publication > Article
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