The Patterning of Sub-500 nm Inorganic Oxide Structures

Title
The Patterning of Sub-500 nm Inorganic Oxide Structures
Authors
Meredith J. Hampton,Stuart S. WilliamsZhilian ZhouJanine Nunes고두현Joseph L. Templeton,Edward T. SamulskiJoseph M. DeSimone
Issue Date
2008-06
Publisher
Advanced materials
Citation
VOL 20, 2667-2673
URI
http://pubs.kist.re.kr/handle/201004/47989
ISSN
09359648
Appears in Collections:
KIST Publication > Article
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