Effect of substrate temperature on structural and optical properties of nitrogen doped SnO2 thin film

Title
Effect of substrate temperature on structural and optical properties of nitrogen doped SnO2 thin film
Authors
Anup ThakurVarinder KumarSe Jun KangIk-Jae Lee가우탐채근화Hyun Joon Shin
Keywords
Thin film; Rutile Structure; Transparency
Issue Date
2014-06
Publisher
AIP conference proceedings
Citation
VOL 1591, 1027-1029
Abstract
Nitrogen doped SnO2thin films (thickness ~ 250 nm) were deposited at different substrate temperature by radio frequency (rf) sputtering method. Crystal structure,morphology and optical properties of these films were investigated byx-ray diffraction (XRD), atomic force microscopy (AFM) and UV-VIS-NIR spectrophotometer, respectively. XRD measurement suggests that the film deposited at room temperature was amorphous in nature and films deposited at higher temperature were crystalline in nature. The film deposited at RT and 200 ℃ have transparency more than 90% in visible region but the film deposited at 400 ℃ has lesser transparency.Red shift was observed in the absorption edge may be due to decrease in ionicity due tothe formation of the Sn–N bond.
URI
http://pubs.kist.re.kr/handle/201004/48157
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KIST Publication > Conference Paper
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