A Review of Three-Dimensional Resistive Switching Cross-Bar Array Memories from the Integration and Materials Property Points of View

Title
A Review of Three-Dimensional Resistive Switching Cross-Bar Array Memories from the Integration and Materials Property Points of View
Authors
석준영Seul Ji SongJung Ho YoonKyung Jean YoonTae Hyung ParkDae Eun Kwon임형광Gun Hwan Kim정두석Cheol Seong Hwang
Keywords
resistance switching; three-dimensional crossbar arrays; memory devices; selection devices; three-dimensional fabrication
Issue Date
2014-09
Publisher
Advanced functional materials
Citation
VOL 24, NO 34, 5316-5339
Abstract
Issues in the circuitry, integration, and material properties of the two-dimensional (2D) and three-dimensional (3D) crossbar array (CBA)-type resistance switching memories are described. Two important quantitative guidelines for the memory integration are provided with respect to the required numbers of signal wires and sneak current paths. The advantage of 3D CBAs over 2D CBAs (i.e., the decrease in effect memory cell size) can be exploited only under certain limited conditions due to the increased area and layout complexity of the periphery circuits. The sneak current problem can be mitigated by the adoption of different voltage application schemes and various selection devices. These have critical correlations, however, and depend on the involved types of resistance switching memory. The problem is quantitatively dealt with using the generalized equation for the overall resistance of the parasitic current paths. Atomic layer deposition is discussed in detail as the most feasible fabrication process of 3D CBAs because it can provide the device with the necessary conformality and atomic-level accuracy in thickness control. Other subsidiary issues related to the line resistance, maximum available current, and fabrication technologies are also reviewed. Finally, a summary and outlook on various other applications of 3D CBAs are provided.
URI
http://pubs.kist.re.kr/handle/201004/48227
ISSN
1616301X
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KIST Publication > Article
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