Blue Inorganic Light Emitting Diode on Flexible Polyimide Substrate Using Laser Lift-Off Process

Title
Blue Inorganic Light Emitting Diode on Flexible Polyimide Substrate Using Laser Lift-Off Process
Authors
닐리쉬김영동고형덕박준서박병남고두현한일기
Keywords
Nano; Laser Lift Off; Blue LED; Inorganic Light Emitting Diode; Lift-off; Flexible Substrate; Blue Light Emitting Diode
Issue Date
2014-11
Publisher
Journal of nanoscience and nanotechnology
Citation
VOL 14, NO 11, 8237-8241
Abstract
The fabrication process for the blue GaN inorganic light emitting diode (ILED) on flexible polyimide (PI) substrate by laser lift off (LLO) method was demonstrated. The GaN epi-structure was grown on patterned sapphire wafer. GaN samples were temporary bonded with polyimide substrate by flexible silver epoxy. Separation of the whole GaN LED film from GaN/sapphire wafer was accomplished using a single KrF excimer (248 nm) laser pulse directed through the transparent sapphire wafer. Device fabrication was carried out on both rigid silicon and flexible polyimide substrate, and I–V performance for both devices was measured. The optimized LLO process for the whole GaN LED film transfer would be applicable in flexible LED applications without compromising electrical properties.
URI
http://pubs.kist.re.kr/handle/201004/48570
ISSN
15334880
Appears in Collections:
KIST Publication > Article
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