A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor

Title
A Micro-Fabricated Force Sensor Using an All Thin Film Piezoelectric Active Sensor
Authors
이준우최욱유용경황교선이상명강성철김진석이정훈
Keywords
force sensor; tactile sensor; piezoelectric; thin film; MEMS
Issue Date
2014-11
Publisher
Sensors
Citation
VOL 14, NO 12, 22199-22207
Abstract
The ability to measure pressure and force is essential in biomedical applications such as minimally invasive surgery (MIS) and palpation for detecting cancer cysts. Here, we report a force sensor for measuring a shear and normal force by combining an arrayed piezoelectric sensors layer with a precut glass top plate connected by four stress concentrating legs. We designed and fabricated a thin film piezoelectric force sensor and proposed an enhanced sensing tool to be used for analyzing gentle touches without the external voltage source used in FET sensors. Both the linear sensor response from 3 kPa to 30 kPa and the exact signal responses from the moving direction illustrate the strong feasibility of the described thin film miniaturized piezoelectric force sensor.
URI
http://pubs.kist.re.kr/handle/201004/48937
ISSN
14248220
Appears in Collections:
KIST Publication > Article
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