Output Characteristics of a Coherent EUV Light Source for EUV Mask Inspection

Title
Output Characteristics of a Coherent EUV Light Source for EUV Mask Inspection
Authors
전영민김용수안준모성하민조운조박민철김점술이주한김재헌서민아이석김용태
Keywords
EUV; Mask Inspection; Coherent
Issue Date
2014-04
Publisher
차세대 리소그래피 학술대회
Citation
, 57-58
URI
http://pubs.kist.re.kr/handle/201004/49041
Appears in Collections:
KIST Publication > Conference Paper
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