Combined epitaxial self-assembly of block copolymer lamellae on a hexagonal pre-pattern within microgrooves

Title
Combined epitaxial self-assembly of block copolymer lamellae on a hexagonal pre-pattern within microgrooves
Authors
정현중우상훈박성민이수미강민혁최영선손정곤류두열허준방준하
Keywords
block copolymer; self assembly; nanopattern
Issue Date
2015-06
Publisher
Soft Matter
Citation
VOL 11, 4242-4250
Abstract
The directed self-assembly (DSA) of block copolymers (BCPs) has emerged as an alternative method to replace or complement conventional photolithography as a result of the approximately 10 nm scale of microdomain ordering, the variety of microstructures that can be obtained and its compatibility with current lithographic processes. In DSA, BCP microdomains are controlled via guide patterns and two main techniques are popular: graphoepitaxy and chemoepitaxy assembly. We have demonstrated a simple and feasible technology for a DSA process by combining graphoepitaxy with ‘‘inexpensive’’ chemoepitaxial assembly to improve the alignment of the lamellar microdomains. For chemoepitaxial assembly, the hexagonal surface patterns from cross-linkable, cylinder-forming BCP were used to guide the graphoepitaxial assembly of the overlying BCP lamellar film. When the guiding patterns were prepared on the hexagonal patterns, it was found that the degree of lamellar alignment was significantly improved compared with the lamellar alignment on the homogeneous neutral layers. Simulation results suggested that the underlying hexagonal pattern can assist the lamellar alignment by reducing the large number of orientation states of the lamellar layers. This strategy is applicable to various nanofabrication processes that require a high degree of fidelity in controlling the nanopatterns over large areas with reduced costs.
URI
http://pubs.kist.re.kr/handle/201004/49773
ISSN
1744683X
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KIST Publication > Article
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