Characterization of Sputter-Deposited LiZr2(PO4)3 Thin Film Solid Electrolyte
- Characterization of Sputter-Deposited LiZr2(PO4)3 Thin Film Solid Electrolyte
- 김희수; Kwang S. Choi; Eun J. Kim; Kihun Kang; Ju H. Kim; 김주선; 윤종승
- Solid Electrolyte; Thin-Film Battery; Li-ion Battery
- Issue Date
- Journal of the Electrochemical Society
- VOL 162, NO 10, A2080-A2084
- 320-nm-thick LiZr2(PO4)3 thin film was prepared by radio frequency sputtering and thermally annealed up to 1000°C to fully crystallize the as-deposited film. The room-temperature ionic conductivity of the film annealed at 800°C was 1.3 × 10−7 S/cm which was inferior compared to its bulk counterpart due to the partial crystallization and small grain size; however, at an elevated temperature, the ionic conductivity approached the bulk value, reaching 4.0 × 10−6 S/cm above 100°C. It was demonstrated that combined with chemical stability of LiZr2(PO4)3 and low electronic conductivity, the LiZr2(PO4)3 thin film can be a possible candidate material for a solid electrolyte operating at an elevated temperature.
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