Characteristic Analysis of Coherent EUV Light Source based on High-order Harmonic Generation

Title
Characteristic Analysis of Coherent EUV Light Source based on High-order Harmonic Generation
Authors
김용수박준김영희성하민김점술이승범조현우조운조김용태이주한전영민
Keywords
EUV; HHG; Nonlinear
Issue Date
2015-04
Publisher
차세대 리소그래피 학술대회
Citation
VOL F2-II-1, 44-45
URI
http://pubs.kist.re.kr/handle/201004/50202
Appears in Collections:
KIST Publication > Conference Paper
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE