CD Measurements of EUV Mask using a Coherent Scattering Microscope Mask Inspection Tool

Title
CD Measurements of EUV Mask using a Coherent Scattering Microscope Mask Inspection Tool
Authors
김용수박준성하민김점술이승범조현우박민철조운조김용태이주한전영민
Keywords
CSM; Coherent; EUV; Mask Inspection; CD Measurement
Issue Date
2015-04
Publisher
차세대 리소그래피 학술대회
Citation
VOL W-II-7, 189-190
URI
http://pubs.kist.re.kr/handle/201004/50203
Appears in Collections:
KIST Publication > Conference Paper
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