Characteristics of the Coherent EUV Light Source for EUV Metrology

Title
Characteristics of the Coherent EUV Light Source for EUV Metrology
Authors
김용수김영희박준성하민김점술이주한전영민
Keywords
EUV; Coherent; HHG; fs Laser
Issue Date
2015-08
Publisher
Conference on Laser and Electro-Optics Pacific Rim(CLEO-PR)
Citation
VOL 25B2-3, 1-2
Abstract
Coherent EUV light at 13.5 nm was generated by high-harmonic generation using a 35-fs pulsed laser at 796 nm in Ne gas, which showed stable operation within 5% deviation over an hour.
URI
http://pubs.kist.re.kr/handle/201004/50204
Appears in Collections:
KIST Publication > Conference Paper
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