Crystal Structure and Optical Properties of Al-Doped ZnO Large-Area Thin Films Using 1500 mm Dual Cylindrical Cathodes

Title
Crystal Structure and Optical Properties of Al-Doped ZnO Large-Area Thin Films Using 1500 mm Dual Cylindrical Cathodes
Authors
이진주하종윤임해나최원국최지원
Keywords
Mesoporous Tin Oxide; Hazardous Gas Sensor; Impregnated Palladium; Transparent Conducting Oxide; Al-Doped ZnO; Cylindrical Type Magnetron Cathode Source
Issue Date
2015-10
Publisher
Journal of nanoscience and nanotechnology
Citation
VOL 15, 8370-8374
Abstract
The large-area Al-doped ZnO thin films are successfully deposited at room temperature on polycarbonate substrate using a 1500 mm dual cylindrical cathodes sputtering system. Those thin films have smooth surfaces (RMS: 9.6 nm) and lower thicknesses deviation (Uniformity: 98.6%) despite of high RF power. The optical transmittance properties of 3.13 wt% Al doped ZnO thin films have above 85% in visible region. A dual cylindrical cathodes sputtering system can fabricate transparent electrode on flexible electronic devices at room temperature for mass production of 6th generation solar cell and display industry
URI
http://pubs.kist.re.kr/handle/201004/50619
ISSN
15334880
Appears in Collections:
KIST Publication > Article
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