Surface and Electrical Properties of 2 wt% Cr-doped Ni Ultrathin Film Electrode for MLCCs

Title
Surface and Electrical Properties of 2 wt% Cr-doped Ni Ultrathin Film Electrode for MLCCs
Authors
임해나이진주최지원
Keywords
Cr-doped Ni; Metal electrode; Electrical properties; Ultrathin films electrode; MLCCs; Sputtering
Issue Date
2015-07
Publisher
Journal of Sensor Science and Technology
Citation
VOL 24, NO 4, 224-227
Abstract
In this study, 2 wt% Cr-doped Ni thin films were deposited using DC sputtering on a bare Si substrate using a 4 inch target at room temperature. In order to obtain ultrathin films from Cr-doped Ni thin films with high electrical properties and uniform surface, the microstructure and electrical properties were investigated as a function of deposition time. For all deposition times, the Cr-doped Ni thin films had low average resistivity and small surface roughness. However, the resistivity of the Cr-doped Ni thin films at various ranges showed large differences for deposition times below 90 s. From the results, 120 s is considered as the appropriate deposition time for Cr-doped Ni thin films to obtain the lowest resistivity, a low surface roughness, and a small difference of resistivity. The Cr-doped Ni thin films are prospective materials for microdevices as ultrathin film electrodes.
URI
http://pubs.kist.re.kr/handle/201004/50622
ISSN
12255475
Appears in Collections:
KIST Publication > Article
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