Evaluation of hindrance to the growth of SiN passivation layer by contamination of fluoride ions in front opening unified pod

Title
Evaluation of hindrance to the growth of SiN passivation layer by contamination of fluoride ions in front opening unified pod
Authors
송길주황성민구수종김형련장희창홍정훈박현율최의지유승교김진영노태용이응선
Issue Date
2015-10
Publisher
Aerosol and air quality research
Citation
VOL 15, NO 5, 2175-2183
URI
http://pubs.kist.re.kr/handle/201004/50964
ISSN
16808584
Appears in Collections:
KIST Publication > Article
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