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Evaluation of hindrance to the growth of SiN passivation layer by contamination of fluoride ions in front opening unified pod

Title
Evaluation of hindrance to the growth of SiN passivation layer by contamination of fluoride ions in front opening unified pod
Authors
송길주; 황성민; 구수종; 김형련; 장희창; 홍정훈; 박현율; 최의지; 유승교; 김진영; 노태용; 이응선
Issue Date
2015-10
Publisher
Aerosol and air quality research
Citation
VOL 15, NO 5, 2175-2183
URI
http://pubs.kist.re.kr/handle/201004/50964
ISSN
16808584
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KIST Publication > Article
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